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Summary
Experimental setup for environmental electron beam deposition (EEBD) in a environmental scanning electron microscope (ESEM).
A precursor gas such as dimethyl gold acetylacetonate is introduced in the chamber either by a source mounted on the sample stage or by an external gas feed system.
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Experimental setup for environmental electron beam deposition (EEBD) in a environmental scanning electron microscope (ESEM). A precursor gas such as dimethyl gold acetylacetonate is introduced in the chamber either by a source mounted on the sample stage
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